How do I automatically delete temp files in C#?

Nothing is guaranteed if the process is killed prematurely, however, I use "using" to do this..

using System;
using System.IO;
sealed class TempFile : IDisposable
{
    string path;
    public TempFile() : this(System.IO.Path.GetTempFileName()) { }

    public TempFile(string path)
    {
        if (string.IsNullOrEmpty(path)) throw new ArgumentNullException("path");
        this.path = path;
    }
    public string Path
    {
        get
        {
            if (path == null) throw new ObjectDisposedException(GetType().Name);
            return path;
        }
    }
    ~TempFile() { Dispose(false); }
    public void Dispose() { Dispose(true); }
    private void Dispose(bool disposing)
    {
        if (disposing)
        {
            GC.SuppressFinalize(this);                
        }
        if (path != null)
        {
            try { File.Delete(path); }
            catch { } // best effort
            path = null;
        }
    }
}
static class Program
{
    static void Main()
    {
        string path;
        using (var tmp = new TempFile())
        {
            path = tmp.Path;
            Console.WriteLine(File.Exists(path));
        }
        Console.WriteLine(File.Exists(path));
    }
}

Now when the TempFile is disposed or garbage-collected the file is deleted (if possible). You could obviously use this as tightly-scoped as you like, or in a collection somewhere.

Consider using the FileOptions.DeleteOnClose flag:

using (FileStream fs = new FileStream(Path.GetTempFileName(),
       FileMode.OpenOrCreate, FileAccess.ReadWrite, FileShare.None,
       4096, FileOptions.RandomAccess | FileOptions.DeleteOnClose))
{
    // temp file exists
}

// temp file is gone

You could P/Invoke CreateFile and pass the FILE_FLAG_DELETE_ON_CLOSE flag. This tells Windows to delete the file once all handles are closed. See also: Win32 CreateFile docs.