ReFS with or without hardware RAID? With or without storage spaces?

Solution 1:

ReFS by itself cannot repair corruptions, it is a feature of Storage Spaces. But ReFS will detect them when on files with data integrity stream enabled when reading the corrupted block, or when ReFS data scrubber encounters the corrupted block during its patrol reads. ReFS is a "new" file system and its stability of ReFS for long-term backup repository is questionable.

Most of backup solution have built-in backup integrity check, so I would better rely on NTFS on H/W Raid.

The ReFS performance in compare to NTFS is covered in following research:

https://www.starwindsoftware.com/blog/refs-performance